engleski

Status of the ALMY semitransparent, amorphous silicon sensors for optical position monitoring systems

Semitransparent optoelectronic position sensors (`ALMY sensors') have been developed for high-precision multipoint alignment monitoring systems. The thin-film amorphous silicon strip sensors provide up to 90% transmittance for visible laser light and a position measurement accuracy of better than 5 small mu, Greekm over sensitive areas of several square centimeters. We report about the results of the recent optimization of the sensor performance and of the readout electronics.

lignment; Laser beams; Silicon detectors; Strip detectors

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