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Grazing-incidence small-angle scattering of synchrotron radiation of nanosized TiO_2 thin films obtained by chemical vapour deposition and spray method

Nanosized TiO_2, 1 micrometer thick, films on curved glass substrates were prepared using CVD (chemical vapour deposition) and spray method procedure. The average grain size <R>, obtained by GISAXS (grazing incidence small angle X-ray scattering), varied with the annealing temperature (500 to 900^0C in H_2, O_2 and N_2) for the CVD samples from 5.2 nm to 9.7 nm. For the TiO_2 films obtained by the spray method, <R> increased with annealing temperature from 4.2 nm to 7.2 nm. Specific surface areas of both these films were also determined and varied from 0.18 × 107cm^-1 to 3.2 × 107cm^-1.

TiO_2 thin films; chemical vapour deposition; GISAXS

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