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Argon ion distribution in cylindrical magnetron discharge by LIF spectroscopy

The cylindrical magnetron device attracts attention during the last two decades as a versatile tool for thin film deposition. The detail knowledge of non-isothermal, low- temperature plasma in magnetic field, which is running in it is a key parameter for connecting the film properties and growth condition. The energy and density distribution of Ar ions in plasma of cylindrical magnetron discharge was examined by laser induced fluorescence (LIF), using the tuneable dye laser in Littman-type design, pumped by pulsed Nd:YAG laser. The magnetron was running in cylindrical-post magnetron configuration, at typical pressures ranges around 1 Pa and moderate cathode current densities (2-10 mA/cm2). The probe beam of approximately 0, 5mm x 3, 5 mm was stepscaned in radial direction, parallel and perpendicular to the electric field. The LIF signal was recorded normally to the probe beam by Photomultiplier, connected to the 0, 25 m monochromator, using boxcar integrator. The sensitivity of applied method and equipment has been discussed The obtained results are compared with recently published data regarding the cylindrical magnetron discharge plasma modelling and sonda carge density measurements.

cylindrical magnetron; LIF spectroscopy; Ar ion energy distribution

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