Structure of W-C films deposited on Si substrates; Surface and subsurface analysis by GISAXS and SAXS patterns (CROSBI ID 482795)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija
Podaci o odgovornosti
Salamon, Krešimir ; Milat, Ognjen ; Dubček, Pavo ; Radić, Nikola
engleski
Structure of W-C films deposited on Si substrates; Surface and subsurface analysis by GISAXS and SAXS patterns
Tungsten carbide films (with average thickness t < 0,5 micron) were deposited onto silicon wafer substrates by reactive DC magnetron sputtering of pure W target with benzene as the carbon-supplying admixture. ...
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Podaci o prilogu
55-55-x.
2002.
objavljeno
Podaci o matičnoj publikaciji
Leisch, Manfred , Winkler, Adolf
Graz: Austrian Vacuum Society
Podaci o skupu
9th Joint Vacuum Conference (JVC9)
poster
16.06.2002-20.06.2002
Leibnitz, Austrija
