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Elastic Energy Fraction as the Phenomenological Connection Between Electrical, Mechanical and Thermal Properties of the Al–(Nb, Mo, Ta, W) Amorphous Thin Films

Some of mechanical, electrical, and thermal properties of the Al–(Nb, Mo, Ta, W) binary thin films which are important for the stability and usability of the amorphous alloys were examined. Samples were prepared by magnetron deposition technique in wide range of composition onto various substrates held at room temperature. Different experimental techniques were used for the characterization of samples. The results of structural relaxation and crystallization measurements under isochronal conditions are compared with the results of measurements of micro/nano hardness and strain in the films. From the micro/nano hardness measurement, the elastic deformation energy fraction is calculated. The elastic deformation energy fraction is correlated with the various results obtained from electrical resistivity measurements under isochronal conditions. Particular emphasis was placed on the Al–Mo amorphous alloys. It turns out that elastic deformation energy fraction becomes important indicator and phenomenological correlation parameter between various physical properties of examined films.

Thin films ; Elastic energy ; Amorphous alloys ; Hardness ; Stress ; Resistivity ; Relaxation ; Crystallization

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