engleski

SAXS/WAXD on thermally annealed nanostructured CVD-obtained TiO2 films

Films of nanostructured TiO2 on glass substrates, prepared by chemical vapor deposition, were examined by small-angle X-ray scattering and wide-angle X-ray diffraction. The films were annealing in oxidizing and reducing atmosphere. By treating a film as a two-phase system of grains and pores, the corrected relative surface of phases, SVC, was calculated as a morphological parameter that combines the relative surface and the volume fractions of the two phases. Its behaviour during the film annealing was tested on TiO2 films. The analysis of evolution of films during thermal annealing treatment is given by means of corrected relative surface correlated with the grain size and structure.

TiO2; CVD; nanostructured metal oxides; SAXS/WAXD

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