Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization (CROSBI ID 463188)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Sassella, Adele ; Borghesi, Alessandro ; Pivac, Branko
engleski
Cross-sectional infrared transmission measurements for highly sensitive thin-film characterization
The results of transmission measurements of SiO2 films in silicon performed in the standard experimental configuration and in a new cross- sectional configurat dagger ion have bran compared. The cross-sectional measurements proved to be the most suitable for characterization of very thin (few nanometres thick) films and in addition are very sensitive.
thin films ; infrared characterization ; thickness measuremen
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Podaci o prilogu
343-344.
1997.
objavljeno
10.1007/978-3-7091-6840-0_77
Podaci o matičnoj publikaciji
Mink, János ; Keresztury, Gábor ; Kellner, Robert
Beč: Springer
978-3-7091-6840-0
0076-8642
Podaci o skupu
Nepoznat skup
predavanje
29.02.1904-29.02.2096
Povezanost rada
Fizika
