engleski

EMISSION OPTICAL SPECTROSCOPY CHARACTERIZATION OF OXYGEN PLASMA DURING TREATMENT OF A MYLAR FOIL

Optical emission spectroscopy analysis of inductively coupled RF oxygen plasma has been performed during plasma treatment of a Mylar foil. Plasma was generated within a glass tube with the internal diameter of 36mm with an RF generator with the frequency of 27.12 MHz and the output power of 300 W. The tube was pumped with a mechanical rotary pump. Experiments were performed at the oxygen pressure of 75 Pa. The density of charged particles was estimated in an empty discharge tube with a double electrical probe and was about 1x1016m– 3. The density of neutral oxygen atoms in the ground state was measured with a catalytic probe and was 3x1021 m– 3. During the plasma processing of the Mylar foil O atom peak at 777, 4 and 844.6 nm, and the CO and H? peaks at 519.7 and 656.2 nm, respectively, have been measured simultaneously every 1s. The results showed that the O peak at 844.6 nm decreased the first 2 second of plasma treatment, reached a well-defined minimum, and increased with plasma treatment for next few second to reach a broad maximum at around 7s. The peak intensity was slowly decreasing with further increase of the treatment time. The behavior of the CO and H peaks was found reversed, i.e. the maximum of these peaks were detected when minimum in O peak was detected. The results were explained by oxidation of the Mylar foil during plasma treatment.

plasma; oxygen; emission spectroscopy; polyester

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