engleski

Micro-Dynamic Behaviour of a Nanometer Positioning System

The identification of the main mechanical macro and micro-dynamics non-linearities which are present in precision positioning systems is performed in this work. The employed compensation technique makes use of a dual-mode control law in which high precision is achieved by using an adaptive pulse width control typology. The obtained positioning accuracy is within the interval of uncertainty of the measurements performed by using a laser interferometric system.

high-precision positioning; mechanical non-linearities; adaptive control

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