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Microfabrication at the Elettra Synchrotron Radiation Facility

The first micro-structures produced at Elettra (Trieste, Italy) with deep x-ray litography are presented in this work. The most important details concerning LIGA technique and in particular deep x-ray litography using synchrotron radiation are described. The scanning electron microscopy images of test micro-structures made of polymethylmethacrylate characterized by a height of 200 micrometers and lateral dimensions in between 10 and 200 micrometers are presented. In all the considered cases good accuracy with high aspect ratios and nanometric roughness is observed.

MEMs; microfabrication; LIGA; deep X-litography

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