Compact Ultra-Precision Slits (CROSBI ID 516774)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Zelenika, Saša ; Rossetti, Daniel
engleski
Compact Ultra-Precision Slits
An innovative mechanical design of a compliant compact slits system is presented. The system is compatible with a high vacuum environment and characterised by a travel range of several millimetres with concurrent nanometric accuracies.
flexures; slits; ultra-high accuracies
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Podaci o prilogu
301-304-x.
2006.
objavljeno
Podaci o matičnoj publikaciji
Proceedings of the 6^th International Conference of the European Society for Precision Engineering and Nanotechnology - Vol. 1
H. Zervos
Beč:
Podaci o skupu
6^th International Conference of the European Society for Precision Engineering and Nanotechnology
poster
28.05.2006-01.06.2006
Beč, Austrija; Baden, Austrija