GISAXS study of Si nanocrystals formation in SiO2 thin films (CROSBI ID 125109)
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Podaci o odgovornosti
Pivac, Branko ; Kovačević, Ivana ; Dubček, Pavo ; Radić, Nikola ; Bernstorff, Sigrid
engleski
GISAXS study of Si nanocrystals formation in SiO2 thin films
We present a study on amorphous SiO/SiO2 superlattice using grazing-incidence small-angle X-ray scattering (GISAXS). Amorphous SiO/SiO2 superlattices were prepared by high vacuum evaporation of 3 nm thin films of SiO and SiO2 (10 layers each) on Si(100) substrate. After the evaporation, samples were annealed at 1100 C for 1h in vacuum, yielding to Si nanocrystals formation. Using a Guinier approximation, the shape and the size of the crystals were obtained.
Si nanostructures ; SiO/SiO2 amorphous superlattice ; small angle X-ray scattering
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