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Optical emission spectroscopy characterization of low-pressure inductively coupled plasma created in oxygen – water mixture (CROSBI ID 519278)

Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija

Glavan, Nataša ; Krstulović, Nikša ; Čutić, Nino ; Milošević, Slobodan ; Cvelbar, Uroš ; Vesel, Alenka ; Drenik, Aleksander ; Mozetič, Miran Optical emission spectroscopy characterization of low-pressure inductively coupled plasma created in oxygen – water mixture // Joint Vacuum Conference, Programme and Book of abstracts / Mašek, Karel (ur.). Prag: Czech Vacuum Society, 2006. str. 88-89-x

Podaci o odgovornosti

Glavan, Nataša ; Krstulović, Nikša ; Čutić, Nino ; Milošević, Slobodan ; Cvelbar, Uroš ; Vesel, Alenka ; Drenik, Aleksander ; Mozetič, Miran

engleski

Optical emission spectroscopy characterization of low-pressure inductively coupled plasma created in oxygen – water mixture

Low-pressure inductively coupled plasma of oxygen-water mixture has been characterized by means of optical emission spectroscopy. The relative abundance of O, H and OH radicals has been studied depending on plasma parameters. Plasma was generated by inductively coupled RF generator (RIZ SW-amp.) with the frequency of 13.56 MHz and adjustable output power up to 300 W in a glass discharge tube with the inner diameter of 36mm. The discharge tube was pumped with a two-stage rotary pump. The water vapor pressure was about 3 Pa and was introduced to plasma region through glass capillary tube. Plasma radiation was measured with a CCD Ocean Optics spectrometer. Emission from highly excited species was found in the ultra-violet, visible and infrared part of the spectra from 200 to 1000 nm. The highest energy of excited radicals was about 15 eV. The rich emission spectra were dominated by atomic transition lines from hydrogen and oxygen: H , H , H , O(3p5P  3s5S), and O(4p3P  3s3S). Molecular hydrogen Fulcher band lines, as well as, OH (A X) band were also found. No emission from O2 and H2O was detected indicating that the concentration of both molecules in water plasma was low. The observed spectra were explained by collision phenomena in the gas phase and on the walls of the discharge tube.

water-oxygen plasma; optical emission spectroscopy

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Podaci o prilogu

88-89-x.

2006.

objavljeno

Podaci o matičnoj publikaciji

Joint Vacuum Conference, Programme and Book of abstracts

Mašek, Karel

Prag: Czech Vacuum Society

Podaci o skupu

Joint Vacuum Conference 11

poster

24.09.2006-28.09.2006

Prag, Češka Republika

Povezanost rada

Fizika, Brodogradnja