engleski

Transition phenomena and striations in inductively coupled radiofrequency plasma studied by optical emission spectroscopy

Various types of standing or moving striations and transition phenomena appear in inductively coupled radio-frequency molecular (or noble gas) plasmas. When plasma is loaded with various vapours of easily evaporated liquids such as ethanol, acetone or water, the observed phenomena could be substantially modified. We present the study of such phenomena by using the optical emission spectroscopy. Inductively coupled RF plasma of hydrogen or argon is generated in the linear glass tube. Vapours are loaded into the plasma through capillary tube ending with a small orifice. The emission spectroscopy is performed longitudinally and transversally to the discharge tube using miniature fiber spectrometers. This allows a real-time monitoring of spatially resolved spectral features. Characteristic phenomena are classified in respect to the plasma parameters and the spectral appearance.

inductively coupled rf plasma; transition phenomena; striations; optical emission spectroscopy

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