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The preparation of thin silica layers by wet thermal oxidation (CROSBI ID 529056)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Gebavi, Hrvoje ; Ivanda, Mile ; Hršak, Damir ; Ristić, Davor ; Furić, Krešimir ; Musić, Svetozar ; Ristić, Mira ; Žonja, Sanja ; Biljanović, Petar ; Gamulin, Ozren et al. The preparation of thin silica layers by wet thermal oxidation // Proceedings of the VIIth International Conference Preparation of ceramic materials / Plešingerova, Beatrice ; Kuffa, Tarzicius (ur.). Košice: Technical University of Košice, 2007. str. 105-107

Podaci o odgovornosti

Gebavi, Hrvoje ; Ivanda, Mile ; Hršak, Damir ; Ristić, Davor ; Furić, Krešimir ; Musić, Svetozar ; Ristić, Mira ; Žonja, Sanja ; Biljanović, Petar ; Gamulin, Ozren ; Balarin, Maja ; Montagna, M. ; Ferarri, M. ; Righini, G.C.

engleski

The preparation of thin silica layers by wet thermal oxidation

The preparation of thin silica layers was done by wet thermal oxidation of silicon in diffusion furnace. Reaction temperature was 1141 °C. The silicon wafer of 5.08 cm in diameter, 280 μ m thicknesses, 111 orientations, n-doped with P has been used as precursor. Thickness of produced layer was 72 - 108 μ m. The base of diffusion furnace was a quartz tube placed in a spiral heater. The flow rate of vapor was constant. Reaction time was varied between 5 and 40 minutes. It was found that there are strong correlation between layer thickness and reaction time. Experimental data confirm theoretical model. When reaction time is longer then 20 minutes experimental data are almost same as theoretical model but there are small deviations at lower temperatures because of thermalization time.

silica layer; wet thermal oxidation; silicon

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Podaci o prilogu

105-107.

2007.

objavljeno

Podaci o matičnoj publikaciji

Proceedings of the VIIth International Conference Preparation of ceramic materials

Plešingerova, Beatrice ; Kuffa, Tarzicius

Košice: Technical University of Košice

978-80-8073-806-8

Podaci o skupu

International Conference Preparation of ceramic materials (7 ; 2007)

predavanje

18.07.2007-20.07.2007

Košice, Slovačka

Povezanost rada

Fizika