engleski

Amorphous versus Nanocrystalline Structure of Sputtered Tungsten Carbon Thin Film

The structure of tungsten carbide thin films (prepared by magnetron sputtering deposition) was found to be apparently amorphous following the observed typical diffuse XRD patterns[1]. In contrast, this extended EM&D investigation discloses its prominent crystalline feature in a form of dense compact aggregate of randomly oriented nanocrystals of rather globular shape and uniform size (D≈ 2-3nm).

Thin film; Nanocrystalline structure; Electron microscopy

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