engleski

Self-organization of Germanium Quantum Dots in Multylayers Produced by Magnetron Sputtering

If QDs can be produced to be ordered in 3D dimension (the superlattice, i.e. QDs ordered analogously to atoms in crystal lattice), new very exciting possibilities for designing new materials are obtained via combination of versatile geometrical arrangements and QDs superlative properties. The samples are prepared by deposition of 20 alternating (Ge+SiO2) and SiO2 bi-layers in a multisource magnetron sputtering KJLC CMS-18 system. Molar ratio of Ge: SiO2 was 40:60 in the mixed layers, while SiO2 layers served as spacers. This report presents few examples of most interesting results obtained by Grazing Incidence Small Angle X-ray Scattering (GISAXS) technique in studying the synthesis of Ge GDs, their properties and self-organization of Ge QDs in SiO2 after co-deposition at various deposition temperature, Td, followed by thermal treatment at Ta = 800o C.

Self-organization; Quantum Dot; Germanium; Magnetron Sputtering

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