engleski

New technique for sensitive carbon depth profiling in thin samples using C-C scattering

A new technique for carbon depth profiling in thin samples is described. It is specially developed to analyze low concentrations of carbon in heavier matrices. The method is based on the carbon-carbon elastic scattering coincidence measurement. Recoiled carbon atoms as well as scattered carbon primary beam are detected by two solid state detectors placed symmetrically around the beam direction at 45. Since scattering products are detected in forward direction, method can be applied only for samples with thickness limited to few tenths of micrometers, depending on both ion energy as well as sample matrix. Capabilities of the technique concerning depth resolution and sensitivity have been tested on thin samples of known composition. When compared with other IBA techniques suitable for detection of carbon in heavy matrices such as 12C(d, p)13C and TOF-ERDA, C-C scattering is shown to be superior in sensitivity. However this advantage can be used only for samples that can be prepared as thin transmission samples.

depth profiling; C-C scattering

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