Optical emission spectroscopy of oxygen low-pressure inductively coupled plasma loaded by ethanol, methanol and acetone vapours (CROSBI ID 532790)
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Podaci o odgovornosti
Glavan, Nataša ; Krstulović, Nikša ; Milošević, Slobodan
engleski
Optical emission spectroscopy of oxygen low-pressure inductively coupled plasma loaded by ethanol, methanol and acetone vapours
Low-pressure inductively coupled oxygen plasma was loaded by ethanol (C2H5OH), methanol (CH3OH) or acetone (C3H5OH) vapours and characterized by means of optical emission spectroscopy. Plasma was generated by inductively coupled RF generator (RIZ SW-amp.) with the frequency of 13.56 MHz and adjustable output power up to 300 W. The plasma was maintained in a glass discharge tube with the inner diameter of 3.6 cm. The discharge tube was pumped with a rotary pump. Vapors were introduced into plasma region through glass capillary tube connected to temperature stabilized liquid container through precise Teflon valve. Partial pressures in the tube were measured by a Baratron gauge. Plasma radiation was measured with CCD Ocean Optics spectrometers (UV- VIS-CGI or LIBS2000+). Emission from highly excited species was found in the ultraviolet, visible and infrared part of the spectra from 200 to 1000 nm. The rich emission spectra were dominated by molecular spectra of CO (3rd positive band and Angstrom band) and OH (A-X band) radicals. Atomic transition lines from hydrogen (H , H ) and oxygen O(3p5P  3s5S), and O(4p3P  3s3S) were observed as well. By observing spectral line intensity ratios, relative abundance of OH, CO, H and O radicals was studied versus oxygen/vapor pressure ratio and discharge power. Optimum conditions for production of various radicals are discussed in terms of vapors characteristics and possible dissociation and recombination mechanisms.
oxygen plasma; methane; acetone; ethanol; optical emission spectroscopy
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Podaci o prilogu
115-115-x.
2007.
nije evidentirano
objavljeno
978-2-9527742-2-2
Podaci o matičnoj publikaciji
Abstract Booklet, 16th International Colloquium on Plasma Processes
Legeay, Gilbert
Toulouse: Societe Francaise du Vide
Podaci o skupu
16th International Colloquium on Plasma Processes
poster
04.06.2007-08.06.2007
Toulouse, Francuska