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Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy (CROSBI ID 136099)
Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija
Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan ; Kenda, Klemen ; Cvelbar, Uroš ; Mozetič, Miran
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy // Ieee transactions on plasma science, 36 (2008), 4; 1368-1369. doi: 10.1109/TPS.2008.920896
Podaci o odgovornosti
Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan ; Kenda, Klemen ; Cvelbar, Uroš ; Mozetič, Miran
engleski
Inductively Coupled RF Oxygen Plasma Studied by Spatially Resolved Optical Emission Spectroscopy
Inductively coupled RF oxygen plasma generated by inductive coil wrapped around a linear glass tube is studied. Images of plasma properties in the linear reactor are presented. Plasma diagnostics was performed by spatially resolved optical emission spectroscopy
oxygen plasma; optical emission spectroscopy
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Podaci o izdanju
36 (4)
2008.
1368-1369
objavljeno
0093-3813
10.1109/TPS.2008.920896
Povezanost rada
Povezane osobe
Povezane ustanove
