Interaction of Oxygen Plasma with Aluminium Substrates (CROSBI ID 137645)
Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Mozetič, Miran ; Cvelbar, Uroš ; Vesel, Alenka ; Krstulović, Nikša ; Milošević, Slobodan
engleski
Interaction of Oxygen Plasma with Aluminium Substrates
Inductively coupled oxygen plasma are widely used for materials processing. Optical emission spectroscopy (OES) using fast miniature fiber spectrometer was used for plasma characterization and process monitoring. Images of plasma and accompanying spectra during interaction with aluminium foil are presented.
inductively coupled plasma; oxygen plasma; aluminium; optical emission spectroscopy
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Podaci o izdanju
36 (4)
2008.
868-869
objavljeno
0093-3813
10.1109/TPS.2008.925383
