engleski

Influence of Hf->Zr substitution on optical and refractometric parameters of Hf1-xZrxO2 thin films

Ellipsometric and spectroscopic investigations of Hf1− xZrxO2 thin films were performed. Dispersion dependences of refractive indices and extinction coefficients in the wavelength interval 0.2?0.7 μ m were obtained by optical-refractometric synthesis of absorption spectra. Optical-refractometric relation is applied to describe the dispersion of the refractive indices. Compositional behaviour of optical pseudogap and refractive indices of HfO2?ZrO2 thin films is studied.

amorphous materials; optical coatings; ellipsometry; optical spectroscopy

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