Optical emission spectroscopy of inductively coupled RF hydrogen plasma (CROSBI ID 541255)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa
Podaci o odgovornosti
Kregar, Zlatko ; Krstulović, Nikša ; Milošević, Slobodan
engleski
Optical emission spectroscopy of inductively coupled RF hydrogen plasma
Low temperature plasmas have a broad area of applications for treatment of various materials. This points to the need for real time plasma characterization during processing. Inductively coupled plasmas are of particular interest since details of the inductive coil design and its surrounding can be used to influence plasma content. Low pressure plasma was created in a glass tube with wrapped copper wire in 8 turns (coil). The coil was connected to a RF generator with a frequency of 13.56 MHz. The power was adjustable up to 300 W. Hydrogen plasma was investigated by means of a LIBS2000+ spectrometer. Optical fiber was placed perpendicularly to the tube, and was moved along the length of the tube which allows spatial resolution. Spectral signatures of hydrogen atom (Balmer series), as well as hydrogen molecule (Fulcher band) were observed. Three distinct zones within the tube with different plasma behaviour (before the coil, within the coil and after the coil) were observed. As discharge power is increased or hydrogen pressure decreased the transition from mode sustained by the static electric field (E-mode) to the mode sustained by the induced electromagnetic field (H-mode) is observed. Intensity ratios between different hydrogen atomic lines, and between atomic lines and Fulcher band were used to monitor plasma parameters. Various hydrogen plasma applications are considered.
hydrogen; inductively coupled plasma; optical emission spectroscopy
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Podaci o prilogu
28-28.
2008.
objavljeno
Podaci o matičnoj publikaciji
Brijuni conference, Book of abstracts
Bosanac, Slobodan
Zagreb: Institut Ruđer Bošković
953-6690-75-6
Podaci o skupu
Brijuni conference, Hydrogen: A universal saga
poster
25.08.2008-29.08.2008
Brijuni, Hrvatska