Modified box coaters can improve oxide coatings (CROSBI ID 85754)
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Zorc, Hrvoje ; Johnson, Robert Jr. ; Snowdon, Kelly ; Morin, Steven
engleski
Modified box coaters can improve oxide coatings
In optoelectronic devices such as dense walvelength-division multiplexers and optical genetic sequencers, there is a drive toward higher spectral channel density-more isolated spectral channels per unit wavelength. In instruments and systems that rely on optical thin-film coatings for spectral discrimination, the burden of supporting this increased bandwidth falls on the optical coatings and ultimately the equipment and processes that produce them.
ion assisted deposition; thin films technology; optical coatings; Ta2O5; TiO2; Sio2
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