engleski

Grazing-incidence SAXS/WAXD on nanosized TiO2 films obtained by ALE

Titanium dioxide films on glass substrate were obtained by atomic layer epitaxy (ALE) method. The average grain radius <R> obtained by GISAXS (grazing-incidence small-angle X-ray scattering), was 13.6 -+ 2.3 nm. The average grain size <R> of 14.1-+ 2.1 nm obtained by GIWAXD (grazing-incidence wide-angle X-ray diffraction) agrees with GISAXS value. The fractal nature of these samples is analyzed.

TiO2; ALE; GISAXS; GIWAXD

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