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Interaction of Magnetrons in a Codeposition Mode (CROSBI ID 544703)

Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija

Jerčinović, Marko ; Siketić, Zdravko ; Grötzschel, Rainer ; Radić, Nikola Interaction of Magnetrons in a Codeposition Mode // Proceedings of ICTF14 & RSD2008 / De Gryse, Roger ; Depla, Diederik ; Poelman, D. et al. (ur.). Ghent: University of Ghent, 2008. str. 331-331

Podaci o odgovornosti

Jerčinović, Marko ; Siketić, Zdravko ; Grötzschel, Rainer ; Radić, Nikola

engleski

Interaction of Magnetrons in a Codeposition Mode

In a co-deposition mode of thin film preparation, two or more magnetrons are simultaneously operated in a deposition chamber. Cross-contamination shields are used to minimize mutual deposition of respective target materials onto each other. However, the magnetron plasmas are in contact above the shield, and the operating conditions of each magnetron are somewhat perturbed due to their interaction. A main consequence of these perturbations is the change of deposition rates of co-deposited materials, which leads to the departure of the true composition of prepared material from the prescribed composition of the film. Film composition being one of key parameters which determine material properties, its reproducibility is essential for correct interpretation of measured properties and applications. Two magnetron characteristics dominantly influence a composition of the materials prepared by a codeposition: a) magnetron discharge IU characteristics, and b) deposition rate as a function of discharge power. Difference between the IU characteristics of singularly operated magnetrons, and those of magnetrons operated simulatenously during codeposition, reveals the perturbation introduced by magnetron plasmas interaction. This interaction mostly affects the respective discharges operating voltage, and thus the average energy of sputtering (argon) ions, which allows to estimate the change of respective deposition rates of codepositing magnetrons. Here, a nominal (prescribed) and measured (RBS method) chemical composition of two series of binary alloys (Al-Mo, Ag-W) are compared, and the observed differences are correlated with the change of operating conditions of two magnetrons due to their respective plasmas interaction.

magnetron; codeposition

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Podaci o prilogu

331-331.

2008.

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objavljeno

978 90 334 7347 0

Podaci o matičnoj publikaciji

Proceedings of ICTF14 & RSD2008

De Gryse, Roger ; Depla, Diederik ; Poelman, D. ; Mahieu, S. ; Leroy, W.P. ; Poelman, H.

Ghent: University of Ghent

Podaci o skupu

14th International Conference on Thin Films

poster

17.11.2008-20.11.2008

Gent, Belgija

Povezanost rada

Fizika