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Space and time resolved optical emission spectroscopy characterization of inductively coupled RF water vapour plasma

Inductively coupled RF water vapour plasma generated in a linear glass tube was studied by means of optical emission spectroscopy. Low pressure water vapour plasma was created by 8 turn coil with an EM field oscillating at 13.56 MHz. Various total pressures (5-14 Pa) and discharge powers (100-300W) were investigated. Excitation temperatures (between 0.6 and 1.0 eV) of the plasma discharge were determined from emission spectra by employing the Boltzmann plot method. E and H modes of plasma and transitions among them were observed. Hysteresis effects were observed by the change of water vapour pressure and discharge power through monitoring of O, H and OH spectral features.

plasma; water vapour; optical emission spectroscopy; plasma modes; hysteresis

Art. no. 145201