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New analytical methods in the Laboratory for Ion Beam Interactions at the RBI: TOF-ERDA and coincident elastic scattering (CROSBI ID 553304)

Prilog sa skupa u zborniku | sažetak izlaganja sa skupa

Bogdanović Radović, Ivančica ; Siketić, Zdravko ; Skukan, Natko ; Jakšić, Milko New analytical methods in the Laboratory for Ion Beam Interactions at the RBI: TOF-ERDA and coincident elastic scattering // 16th International Scientific Meeting on Vacuum Science and Technique, Book of Abstracts / Kovač, Janez ; Mozetič, Miran (ur.). Ljubljana: Društvo za vakuumsko tehniko Slovenije, 2009

Podaci o odgovornosti

Bogdanović Radović, Ivančica ; Siketić, Zdravko ; Skukan, Natko ; Jakšić, Milko

engleski

New analytical methods in the Laboratory for Ion Beam Interactions at the RBI: TOF-ERDA and coincident elastic scattering

Since recently, two new analytical methods are available for depth profiling and quantification of light elements in thin films in the Laboratory for Ion Beam Interactions. TOF ERDA method uses heavy and energetic ion beams to recoil lighter products from the target. Mass resolution of 1 amu for the elements (Z < 14) has been achieved with surface depth resolution for oxygen around 5 nm in SiO2 matrix. TOF ERDA efficiency is often less than unity for light elements. This is particularly critical for hydrogen where detection efficiency can be drastically reduced (~ 10%). To improve TOF ERDA detection efficiency for H, electron emission of thin C foils (~0.3 µ g/cm2) was enhanced by evaporating thin LiF layer on the foil. That improves significantly H detection efficiency and makes TOF ERDA spectrometer suitable for hydrogen analysis. Some recent results of multilayer analysis as well as analyisis of hydrogen containig samples are shown.

IBA techniques; TOF-ERDA; coincident elastic scattering

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Podaci o prilogu

2009.

objavljeno

Podaci o matičnoj publikaciji

16th International Scientific Meeting on Vacuum Science and Technique, Book of Abstracts

Kovač, Janez ; Mozetič, Miran

Ljubljana: Društvo za vakuumsko tehniko Slovenije

Podaci o skupu

16th International Scientific Meeting on Vacuum Science and Technique

pozvano predavanje

04.06.2009-05.06.2009

Bohinj, Slovenija

Povezanost rada

Fizika