New analytical methods in the Laboratory for Ion Beam Interactions at the RBI: TOF-ERDA and coincident elastic scattering (CROSBI ID 553304)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa
Podaci o odgovornosti
Bogdanović Radović, Ivančica ; Siketić, Zdravko ; Skukan, Natko ; Jakšić, Milko
engleski
New analytical methods in the Laboratory for Ion Beam Interactions at the RBI: TOF-ERDA and coincident elastic scattering
Since recently, two new analytical methods are available for depth profiling and quantification of light elements in thin films in the Laboratory for Ion Beam Interactions. TOF ERDA method uses heavy and energetic ion beams to recoil lighter products from the target. Mass resolution of 1 amu for the elements (Z < 14) has been achieved with surface depth resolution for oxygen around 5 nm in SiO2 matrix. TOF ERDA efficiency is often less than unity for light elements. This is particularly critical for hydrogen where detection efficiency can be drastically reduced (~ 10%). To improve TOF ERDA detection efficiency for H, electron emission of thin C foils (~0.3 µ g/cm2) was enhanced by evaporating thin LiF layer on the foil. That improves significantly H detection efficiency and makes TOF ERDA spectrometer suitable for hydrogen analysis. Some recent results of multilayer analysis as well as analyisis of hydrogen containig samples are shown.
IBA techniques; TOF-ERDA; coincident elastic scattering
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Podaci o prilogu
2009.
objavljeno
Podaci o matičnoj publikaciji
16th International Scientific Meeting on Vacuum Science and Technique, Book of Abstracts
Kovač, Janez ; Mozetič, Miran
Ljubljana: Društvo za vakuumsko tehniko Slovenije
Podaci o skupu
16th International Scientific Meeting on Vacuum Science and Technique
pozvano predavanje
04.06.2009-05.06.2009
Bohinj, Slovenija