engleski

GISAXS Measurements of Nanostructured Titanium Dioxide Thin Films

In SAXS – beamline at ELETTRA we have measured GISAXS (grazing–incidence small–angle X-ray scattering) of TiO2 thin films samples on glass substrate at grazing angles from 0.3 to 0.7 degrees. These samples were prepared by two prepaation procedures of CVD (chemical vapour deposition) and e-beam epitaxy. The goal of this work was to determine relevant parameters as grain sizes and porosity of all samples and then make decision which preparation is the most suitable for construction of nanostructured solar cells. Analysis of data is in progress in preparation for publications in some of international scientific journals for materials science and physics. Figure 1 shows 2D GISAXS patterns of TiO2 nanostructured porous films on glass substrate obtained by CVD method. Films are annealed for half an hour at 100°C, 200°C, 500°C, 740°C, 700°C, 800°C, 900°C and 900°C for 5, 5 hours. In the upper horizontal row the first sample is at room temperature, than samples at 100°C, 200°C, second row 500°C, 740°C, 700°C and third row 800°C, 900°C and 900°C for 5, 5 hours. It is actually showing structural phase transition from low temperature anatase phase to high temperature rutile. The phase transition is starting at 800°C, which could be observed as a difference in GISAXS pattern shape. The nanograin sizes and porosity could be obtained from linear vertical and horizontal cuts in 2D patterns.

GISAXS; TiO2; nanostructured films

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