Morphology of thin Ti-films produced by double-pulse laser deposition (CROSBI ID 579521)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa
Podaci o odgovornosti
Krstulović, Nikša ; Salamon, Krešimir ; Modič, Martina ; Bišćan, Marijan ; Milat, Ognjen ; Milošević, Slobodan
engleski
Morphology of thin Ti-films produced by double-pulse laser deposition
The thin Ti-films were fabricated by dual-pulse laser ablation of titanium target in vacuum. The influence of pulse to pulse delay time tau on the morphology of deposited Ti-films was studied, using x-ray reflectivity and atomic force microscopy. The results show strong dependence of Ti-film thickness, density and roughness on tau, for tau< 2.17 micros. In addition, correlation of average density and thickness of film is observed. These results are discussed in terms of tau dependency of angular distribution of ablated plume. Advantages related to double pulse deposition are reported.
pulsed laser depositon; thin films; titanium; morphology; dual-pulse; AFM; x-ray reflectivity
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Podaci o prilogu
29-29.
2011.
objavljeno
Podaci o matičnoj publikaciji
18th International Scientific Meeting on Vacuum Science and Techniques, Book of abstracts
Mozetič, Miran ; Vesel, Alenka
Ljubljana: Slovenian Society for Vacuum Technique (DVTS)
978-961-92989-2-3
Podaci o skupu
18th International Scientific Meeting on Vacuum Science and Techniques
poster
02.06.2011-03.06.2011
Bohinj, Slovenija