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Morphology of thin Ti-films produced by double-pulse laser deposition (CROSBI ID 579521)

Prilog sa skupa u zborniku | sažetak izlaganja sa skupa

Krstulović, Nikša ; Salamon, Krešimir ; Modič, Martina ; Bišćan, Marijan ; Milat, Ognjen ; Milošević, Slobodan Morphology of thin Ti-films produced by double-pulse laser deposition // 18th International Scientific Meeting on Vacuum Science and Techniques, Book of abstracts / Mozetič, Miran ; Vesel, Alenka (ur.). Ljubljana: Slovenian Society for Vacuum Technique (DVTS), 2011. str. 29-29

Podaci o odgovornosti

Krstulović, Nikša ; Salamon, Krešimir ; Modič, Martina ; Bišćan, Marijan ; Milat, Ognjen ; Milošević, Slobodan

engleski

Morphology of thin Ti-films produced by double-pulse laser deposition

The thin Ti-films were fabricated by dual-pulse laser ablation of titanium target in vacuum. The influence of pulse to pulse delay time tau on the morphology of deposited Ti-films was studied, using x-ray reflectivity and atomic force microscopy. The results show strong dependence of Ti-film thickness, density and roughness on tau, for tau< 2.17 micros. In addition, correlation of average density and thickness of film is observed. These results are discussed in terms of tau dependency of angular distribution of ablated plume. Advantages related to double pulse deposition are reported.

pulsed laser depositon; thin films; titanium; morphology; dual-pulse; AFM; x-ray reflectivity

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Podaci o prilogu

29-29.

2011.

objavljeno

Podaci o matičnoj publikaciji

18th International Scientific Meeting on Vacuum Science and Techniques, Book of abstracts

Mozetič, Miran ; Vesel, Alenka

Ljubljana: Slovenian Society for Vacuum Technique (DVTS)

978-961-92989-2-3

Podaci o skupu

18th International Scientific Meeting on Vacuum Science and Techniques

poster

02.06.2011-03.06.2011

Bohinj, Slovenija

Povezanost rada

Fizika