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Piezoelectrically Actuated and Sensed Silicon Carbide Ring MEMS Resonators

In this work, in order to demonstrate electrical actuation and sensing in SiC flexural ring resonators, PZT electrodes have been integrated on SiC flexural ring resonators. Ring shaped resonators in 3C-SiC with a radius between 60 µm and 200 µm and hole radius of 5 µm and 10 µm that operate between 600 kHz and 3.7 MHz have been designed, fabricated and tested. The linearity of the device as a function of input power has been studied. Good linearity behaviour has been observed, suggesting devices with good reliability.

silicon carbide; MEMS resonator; ring resonator; piezoelectric sensing; piezoelectric actuation

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