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C/W nanolaminates - alternating various C & W phases

Carbon/tungsten nanolaminates were produced by sequential magnetron sputtering. Deposition parameters (argon pressure, substrate temperature) have been selected in a way to obtain various phases either of tungsten or carbon. Prepared nanolaminates have been examined by AFM, SEM, TEM, XRR and GISAXS in order to derive information on surface and interfaces geometry/ topography. Mechanical properties have been examined by nanoindentation. Reflectivity was measured to estimate overall quality of the prepared C/W nanolaminates in a role of X-ray mirror.

C/W nanolaminates; magnetron sputtering; X-ray reflectivity; GISAXS

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