engleski

Piezoelectrically Transduced Silicon Carbide MEMS Double-Clamped Beam Resonators

In this work, we present the the design, fabrication and testing of piezoelectrically transduced 3C-SiC double-clamped beam MEMS resonant devices. The influence of the DC bias voltage, electrode and beam dimensions on the resonant frequency, including the impact of the DC voltage on the linearity of the frequency response, is investigated.

silicon carbide; MEMS resonator; double-clamped beam resonator; piezoelectric sensing; piezoelectric actuation

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