engleski

Silicon Carbide MEMS Cantilever Resonator with Piezoelectric Actuation and Sensing

A silicon carbide single-clamped beam (cantilever) microelectromechanical system (MEMS) resonant device actuated piezoelectrically and sensed piezoelectrically has been presented. Lead zirconium titanate (PZT) has been used as active material to implement the piezoelectric actuator and sensor. Piezoelectric electrodes have been placed on the top of the single 3C-SiC beam forming a flexural-mode resonator. Operation has been demonstrated with two-port measurements of the transmission frequency response. The 250-µm long device resonates at 372 kHz with Q factor of 385 in the atmospheric conditions.

Silicon carbide; MEMS; resonator; cantilever; piezoelectric actuation; piezoelectric sensing

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