Nalazite se na CroRIS probnoj okolini. Ovdje evidentirani podaci neće biti pohranjeni u Informacijskom sustavu znanosti RH. Ako je ovo greška, CroRIS produkcijskoj okolini moguće je pristupi putem poveznice www.croris.hr
izvor podataka: crosbi

Structure and morphology of magnetron sputtered W films studied by x-ray methods (CROSBI ID 190491)

Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija

Salamon, Krešimir ; Milat, Ognjen ; Radić, Nikola ; Dubček, Pavo ; Jerčinović, Marko ; Bernstorff, Sigrid Structure and morphology of magnetron sputtered W films studied by x-ray methods // Journal of physics. D, Applied physics, 46 (2013), 095304-1-095304-10. doi: 10.1088/0022-3727/46/9/095304

Podaci o odgovornosti

Salamon, Krešimir ; Milat, Ognjen ; Radić, Nikola ; Dubček, Pavo ; Jerčinović, Marko ; Bernstorff, Sigrid

engleski

Structure and morphology of magnetron sputtered W films studied by x-ray methods

The structural and morphological studies of a number of tungsten (W) thin films were carried out using grazing incidence x-ray diffraction, x-ray reflectivity and grazing incidence small-angle x- ray scattering. The W films were prepared by magnetron sputtering in an Ar atmosphere at various pressures and with different powers applied to the W target. We find films with metastable β-W or amorphous phase in the form of nano-columns when deposited at high Ar pressure (>5 mTorr) or with low sputtering power (<20 W), respectively. The appearance of the metastable β-W phase is related to the lowered deposition flux of W atoms, increased film porosity and correspondingly to the higher probability of oxygen incorporation. In films with only the β-W phase we find up to 50% reduction in mass density compared with the density of bulk tungsten. The nanoporosity of the W films is discussed in terms of self-shadowing effects.

tungsten (W) thin films; structure; morphology; magnetron sputtering; GIXRD; XRR; GISAXS; X-ray

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

Podaci o izdanju

46

2013.

095304-1-095304-10

objavljeno

0022-3727

10.1088/0022-3727/46/9/095304

Povezanost rada

Fizika

Poveznice
Indeksiranost