Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout (CROSBI ID 597772)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Mastropaolo, Enrico ; Sviličić, Boris ; Cheung, Rebecca
engleski
Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout
Silicon carbide MEMS resonators with electrothermal actuation and piezoelectric sensing are presented. By varying the d.c. input bias from 1V to 7V the devices’ frequency can be tuned to 300, 000ppm and Q-factor improved by 130%. The influence of structures’ dimension on frequency shift, Q-factor and energy dissipation is discussed.
silicon carbide; MEMS resonator; electrothermal actuation; piezoelectric sensing; frequency tuning
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Podaci o prilogu
2013.
objavljeno
Podaci o matičnoj publikaciji
Proceedings of the 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
Nashville (TN):
Podaci o skupu
The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication
predavanje
28.05.2013-31.05.2013
Nashville (TN), Sjedinjene Američke Države