Nalazite se na CroRIS probnoj okolini. Ovdje evidentirani podaci neće biti pohranjeni u Informacijskom sustavu znanosti RH. Ako je ovo greška, CroRIS produkcijskoj okolini moguće je pristupi putem poveznice www.croris.hr
izvor podataka: crosbi !

Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout (CROSBI ID 597772)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Mastropaolo, Enrico ; Sviličić, Boris ; Cheung, Rebecca Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout // Proceedings of the 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication. Nashville (TN), 2013

Podaci o odgovornosti

Mastropaolo, Enrico ; Sviličić, Boris ; Cheung, Rebecca

engleski

Tunability of silicon carbide resonators with electrothermal actuation and piezoelectric readout

Silicon carbide MEMS resonators with electrothermal actuation and piezoelectric sensing are presented. By varying the d.c. input bias from 1V to 7V the devices’ frequency can be tuned to 300, 000ppm and Q-factor improved by 130%. The influence of structures’ dimension on frequency shift, Q-factor and energy dissipation is discussed.

silicon carbide; MEMS resonator; electrothermal actuation; piezoelectric sensing; frequency tuning

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

Podaci o prilogu

2013.

objavljeno

Podaci o matičnoj publikaciji

Proceedings of the 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

Nashville (TN):

Podaci o skupu

The 57th International Conference on Electron, Ion, and Photon Beam Technology and Nanofabrication

predavanje

28.05.2013-31.05.2013

Nashville (TN), Sjedinjene Američke Države

Povezanost rada

nije evidentirano