engleski

Piezoelectric Sensing of Electrothermally Actuated Silicon Carbide MEMS Resonators

Silicon carbide MEMS resonators with electrothermal actuation and piezoelectric sensing have been presented. The devices have been designed as a double-clamped beam resonator with platinum electrothermal actuator and lead-zirconium-titanate piezoelectric sensor placed on the top of the 3C-SiC beam. The influence of piezoelectric sensor design on device performance (resonant frequency and Q factor) has been investigated. In order to perform a comparative study, the devices with different piezoelectric sensor lengths have been fabricated, while other dimensions and technological parameters have been kept the same. Fabricated 200 µm long devices resonate between 0.6 MHz and 1.1 MHz with Q factor in air up to 410. The frequency tuning range of about 300, 000 ppm has been achieved using relatively low DC input voltage (2 V – 6 V). Experimental results show that as the length of the piezoelectric sensor decreases, the resonant frequency and Q factor increase while the frequency tuning range decreases.

silicon carbide; MEMS resonator; piezoelectric sensing; electrothermal actuation; tuning

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