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A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing (CROSBI ID 614847)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing // Proceedings of the 28th European Conference on Solid-State Transducers. Brescia, 2014

Podaci o odgovornosti

Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca

engleski

A MEMS Filter Based on Ring Resonator with Electrothermal Actuation and Piezoelectric Sensing

We report on the design of a two-port ring microelectromechanical (MEMS) resonator with electrothermal actuation and piezoelectric sensing for filtering applications. The ring resonator has been fabricated in silicon carbide with top platinum electrothermal actuator and lead zirconium titanate piezoelectric sensor. The transmission frequency response measurements have shown that the device with the ring radius of 200μm resonate in the frequency range 0.4MHz – 0.6MHz, in the presence of tuning. By applying DC bias voltage in the range 4V – 10V and frequency tuning range of 330, 000ppm has been achieved.

MEMS; filter; ring resonator; electrothermal actuation; piezoelectric sensing; tuning

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Podaci o prilogu

2014.

objavljeno

Podaci o matičnoj publikaciji

Proceedings of the 28th European Conference on Solid-State Transducers

Brescia:

Podaci o skupu

European Conference on Solid-State Transducers (EUROSENSORS 2014)

poster

01.01.2014-01.01.2014

Brescia, Italija

Povezanost rada

nije evidentirano