A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing (CROSBI ID 614848)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca.
engleski
A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing
We report on a microelectromechanical (MEMS) cantilever resonator that is electrothermally actuated and piezoelectrically sensed, and has voltage tunable centre frequency. The device has been designed as a two-port vertical-mode cantilever resonator. The single- clamped beam (cantilever) resonator has been fabricated in silicon carbide with top platinum electrothermal actuator (input port) and lead zirconium titanate piezoelectric sensor (output port). The two- port transmission frequency response measurements have shown that the device with a beam length of 200 µm resonate at 522.2 kHz with a Q factor in air of 415. By applying DC bias voltage in the range 6 V – 11 V, a frequency tuning range of about 1, 300 ppm has been achieved.
MEMS; cantilever resonator; electrothermal actuation; piezoelectric sensing; tuning
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Podaci o prilogu
2014.
objavljeno
Podaci o matičnoj publikaciji
Proceedings of the 40th International Conference on Micro and Nano Engineering
Lausanne:
Podaci o skupu
40th International Conference on Micro and Nano Engineering
poster
21.09.2014-24.09.2014
Lausanne, Švicarska