Nalazite se na CroRIS probnoj okolini. Ovdje evidentirani podaci neće biti pohranjeni u Informacijskom sustavu znanosti RH. Ako je ovo greška, CroRIS produkcijskoj okolini moguće je pristupi putem poveznice www.croris.hr
izvor podataka: crosbi !

A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing (CROSBI ID 614848)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca. A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing // Proceedings of the 40th International Conference on Micro and Nano Engineering. Lausanne, 2014

Podaci o odgovornosti

Sviličić, Boris ; Mastropaolo, Enrico ; Cheung, Rebecca.

engleski

A MEMS Cantilever Resonator with Electrothermal Actuation and Piezoelectric Sensing

We report on a microelectromechanical (MEMS) cantilever resonator that is electrothermally actuated and piezoelectrically sensed, and has voltage tunable centre frequency. The device has been designed as a two-port vertical-mode cantilever resonator. The single- clamped beam (cantilever) resonator has been fabricated in silicon carbide with top platinum electrothermal actuator (input port) and lead zirconium titanate piezoelectric sensor (output port). The two- port transmission frequency response measurements have shown that the device with a beam length of 200 µm resonate at 522.2 kHz with a Q factor in air of 415. By applying DC bias voltage in the range 6 V – 11 V, a frequency tuning range of about 1, 300 ppm has been achieved.

MEMS; cantilever resonator; electrothermal actuation; piezoelectric sensing; tuning

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

nije evidentirano

Podaci o prilogu

2014.

objavljeno

Podaci o matičnoj publikaciji

Proceedings of the 40th International Conference on Micro and Nano Engineering

Lausanne:

Podaci o skupu

40th International Conference on Micro and Nano Engineering

poster

21.09.2014-24.09.2014

Lausanne, Švicarska

Povezanost rada

nije evidentirano