Inhomogeneities in Y2O3 and CeO2 optical films (CROSBI ID 482350)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Janicki, Vesna ; Zorc, Hrvoje
engleski
Inhomogeneities in Y2O3 and CeO2 optical films
The inhomogeneities in optical films, caused by the onset of nucleation and growth of the film adjacent to amorphous glass surface, are one among numerous sources of errors in precise optical coatings production. In some recent papers it was shown that the model of the multilayer system containing a certain number of films could analyze ZrO2 films. We have used a similar modeling approach to analyze some other optical materials such as Y2O3 and CeO2. Films have been produced using a standard reactive evaporation technique. Following the measurement results, obtained by zero angle transmission and variable angle spectroscopic ellipsometry, reverse design of the monolayer with its sub-layers has been performed. A very good fit of the experimental data with the reverse designed multilayers has been obtained, showing that it is possible to find a fine substructure of analyzed films. The obtained stacks can be used then in the multilayer design process as replacement for a single film adjacent to the substrate.
oxides; indx of refraction; reverse design
nije evidentirano
nije evidentirano
nije evidentirano
nije evidentirano
nije evidentirano
nije evidentirano
Podaci o prilogu
334-338-x.
2001.
objavljeno
Podaci o matičnoj publikaciji
44th Annual Technical Conference Proceedings
Mattox, Donald M.
Albuquerque (NM): Society of Vacuum Coaters
Podaci o skupu
44th Annual Technical Conference of the Society of Vacuum Coaters
predavanje
21.04.2001-26.04.2001
Philadelphia (PA), Sjedinjene Američke Države