Diatomic molecule spectroscopy in low pressure radio-frequency inductively coupled cold plasma (CROSBI ID 393487)
Ocjenski rad | diplomski rad
Podaci o odgovornosti
Jarić, Ognjen
Milošević, Slobodan
engleski
Diatomic molecule spectroscopy in low pressure radio-frequency inductively coupled cold plasma
This paper examines inductively coupled nitrogen plasma using emission spectroscopy. The pressure of nitrogen plasma ranged from 8 to 236 Pa and power ranged from 50 to 300W. The spectrum of nitrogen plasma is composed of a first positive band N_2 B^3Π_g ― A^3Σ_u ^+ and the second positive band N_2 C^3Π_u ― B^3Π_g. Additionally, lines of nitrogen ions N_2^+, and its first negative band C^3Π_u ― B^2Σ_u^+ were noticed as they are more distinct at lower pressures and higher powers. By simulating the plasma spectrum it was observed that increasing the pressure of nitrogen plasma leads to the lowering of the electron excitation temperature in the plasma, while changing power showed no change in electron temperature. Comparing the vibrational temperatures of the simulated and measured spectrums, a drop in vibrational temperature was noticed when the power was decreased. In comparing the measured results with the simulation of the nitrogen plasma, the spectra matched the most at electron temperatures of 4000 to 5000K, vibrational temperatures of 2500 to 4500K and at the rotational temperature of 850K, which was the lowest temperature that could be simulated.
spectroscopy; nitrogen; plasma
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Podaci o izdanju
54
25.02.2014.
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Prirodoslovno-matematički fakultet, Zagreb
Zagreb