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Swift heavy ion tracks in amorphous thin films and multilayers

Recently we have demonstrated a new approach for the investigation of ion tracks in amorphous materials using grazing incidence small angle X-ray scattering (GISAXS). Furthermore, ion tracks in those materials exhibit typical specifics like the velocity effect. In this contribution new developments are presented. Irradiation of flat solid surfaces by swift heavy ions (SHI) under grazing incidence can result in the formation of surface ion tracks that are usually observed directly using atomic force microscopy (AFM). Here we introduce a new approach based on the GISAXS technique, used for the structural analysis of surface tracks. In addition, we show how grazing incidence SHI irradiation can be used to produce nanoscale ripples. Compared to our previous work where 15 MeV Si4+ was the most energetic ion beam used, in the present work our research was extended to higher values of electronic energy loss by using 23 MeV I6+ and 92 MeV Xe23+ ion beams. New ion track phenomena were observed after 92 MeV Xe23+ irradiation: after the grazing incidence irradiation, nanostripes were observed on the surface, while after irradiation under oblique angles, evidence for nucleation of nanoparticles by single ions was found.

swft heavy ion; ion track; ITO; AFM; GISAXS

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