engleski

Optical Emission Spectroscopy of Gaseous Plasma Upon Degreasing of Ceramic Objects

Experiments on discharge cleaning of porous ceramic samples in oxygen plasma were performed. The samples were soaked with oil and exposed to inductively coupled oxygen plasma at the pressure of 75 Pa. Optical emission spectroscopy was applied to reveal the temporal evolution of reactive gaseous radicals suitable for oxidation of organic molecules as well as reaction products. The intensity of the major atomic oxygen lines at 777 and 845 nm predominated at the beginning of the cleaning process and they were an order of magnitude larger than any other spectral feature. The other features observed were H atomic lines from Balmer series and OH bands. The cleaning intensity was indicated by appearance of the COradical bands that became predominant when the oxidation of the oil was most intensive. Once the oil was totally removed the intensity of the CO bands dropped below the background. The results show applicability of the technique for monitoring evolution of the products cleanliness in a batch industrial process.

Optical emission spectroscopy; plasma degreasing of ceramics

nije evidentirano