GISAXS characterization of the ion-irradiation induced surface tracks (CROSBI ID 633529)
Prilog sa skupa u zborniku | sažetak izlaganja sa skupa | međunarodna recenzija
Podaci o odgovornosti
Buljan, Maja ; Karlušić, Marko ; Bogdanović-Radović, Ivančica ; Mekterović, Igor ; Jerčinović, Marko ; Mekterović, Darko ; Schleberger, M. ; Bernstorff, Sigrid ; Radić, Nikola
engleski
GISAXS characterization of the ion-irradiation induced surface tracks
Ion-irradiation of materials is a powerful tool for the design of their properties via changes induced within the ion tracks. Characterization of these changes is usually difficult, especially if the tracks are completely or partially below the surface as well as in amorphous systems where the contrast between the track and the surrounding material is low. Therefore, a simple and efficient method for the characterization of ion beam induced changes and all similar effects in materials is of great importance. Here we present models and a program for the analysis of different types of ion-irradiation induced tracks at the material surface or just below it by GISAXS (grazing incidence small angle x-ray scattering). The structure of the formed tracks is often non-continuous, i.e, the tracks consist of nano-sized structures aligned along the ion beam trajectory. The proposed method allows determination of all important ion track properties inc1uding their structure, shape, size, separation as well as all properties of the formed nano-objects for the non-continuous tracks. The efficiency of the method is demonstrated using ion tracks produced in Ge+ITO mixture film irradiated by 15 MeV Si ions. The developed models are incorporated into a new freely available program GISAXStudio for processing and analysis of materials modified by ion beams using GISAXS.
GISAXS; ion-irradiation; ion tracks; surface
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Podaci o prilogu
25-25.
2015.
objavljeno
Podaci o matičnoj publikaciji
22nd International Scientific Meeting on Vacuum Science and Technique: Programme and Book of Abstracts
Kovač, Janez ; Jakša, Gregor
Ljubljana: Slovenian Society for Vacuum Technique (DVTS)
978-961-92989-7-8
Podaci o skupu
22nd International Scientific Meeting on Vacuum Science and technique
poster
21.05.2015-22.05.2015
Osilnica, Slovenija