engleski

Characterization of amorphous silicon carbon alloys by IBA technique and optical spectroscopy

The composition of amorphous silicon carbide thin films, deposited by magnetron sputtering were analysed by vibration spectroscopy (FTIR, Raman), Auger spectroscopy (AES) and IBA technique (Ion Beam Analysis) which includes RBS (Rutherford Backscattering Spectrometry) and ERDA (Elastic Recoil Detection Analysis). In order to ečnhance the depth and compositional resolution, IBA was performed with several kinds of ions and with different energies. In particular, attention was paid to the determination of carbon to silicon ratio, hy<drogen concentration and possibility of estimation of their distribution across the depth of the thin film. The vibrational and AES spectroscopies were performed on standard equipment and using establishing methods for quantitative analysis. The results obtained by all of applied methods agreed in most cases. The differences which appeared, in particularly at high hydrogen and/or carbon concentration were discussed in framework of possible "solid state" effects on vibrationa properties.

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