engleski

EBS/C proton spectra from a virgin diamond crystal

In the present work, elastic backscattering channeling spectra, EBS/C, of protons in a h100i diamond crystal were experimentally and theoretically studied via a new computer simulation code. Proton incident energies for EBS/C spectra were in the energy range from 1.0 MeV to 1.9 MeV. The energy range was chosen in order to explore a distinct strong resonance of the 12C(p, p0)12C elastic scattering at 1737 keV. The computer simulation code applied for the fitting of the experimental spectra in the random mode was compared with the corresponding SIMNRA results. In the channeling mode, it assumes a Gompertz type sigmoidal dechanneling function, which has two fitting parameters, xc and k, the dechanneling range and rate, respectively. It also uses a, ratio of the channeling to random energy losses, as a fitting parameter. It was observed that xc increases, k decreases and a stays relatively constant with the proton incident energy. These observations confirm the physical interpretation of the fitting parameters. Also, they constitute the basics for the further development of the code for the quantification of induced amorphization and depth profiling of implanted ions.

EBS/C, Dechanneling, Diamond, Carbon, Computer simulation

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