Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing (CROSBI ID 653053)
Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca
engleski
Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing
The operating frequency of a micro-electro-mechanical (MEMS) diaphragm resonator with piezoelectric actuation and read-out has been tuned by electrothermal transduction. The influence of the electrothermal tuning configuration on resonant behaviour of the structure has been investigated. The resonator is fabricated as a multilayer diaphragm structure with top piezoelectric actuator and sensor, and two electrothermal electrodes for resonant frequency tuning. Two-port transmission frequency response measurements have shown that the frequency tuning range can be maximised (up to three-fold) by optimising the configuration of electrothermal transduction.
MEMS, Resonator, Tunable filter, Piezoelectric actuation, Piezoelectric sensing, Electrothermal piezoelectric tuning
nije evidentirano
nije evidentirano
nije evidentirano
nije evidentirano
nije evidentirano
nije evidentirano
Podaci o prilogu
183-185.
2017.
objavljeno
Podaci o matičnoj publikaciji
Proceedings of the 3rd International Conference on Sensors and Electronic Instrumentation Advances
Moskva:
978-84-697-5615-7
Podaci o skupu
3rd International Conference on Sensors and Electronic Instrumentation Advances
predavanje
20.09.2017-22.09.2017
Moskva, Ruska Federacija