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Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing (CROSBI ID 653053)

Prilog sa skupa u zborniku | izvorni znanstveni rad | međunarodna recenzija

Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing // Proceedings of the 3rd International Conference on Sensors and Electronic Instrumentation Advances. Moskva, 2017. str. 183-185

Podaci o odgovornosti

Sviličić, Boris ; Wood, Graham ; Mastropaolo, Enrico ; Cheung, Rebecca

engleski

Electrothermal Tuning of MEMS Filter Resonator with Piezoelectric Actuation and Sensing

The operating frequency of a micro-electro-mechanical (MEMS) diaphragm resonator with piezoelectric actuation and read-out has been tuned by electrothermal transduction. The influence of the electrothermal tuning configuration on resonant behaviour of the structure has been investigated. The resonator is fabricated as a multilayer diaphragm structure with top piezoelectric actuator and sensor, and two electrothermal electrodes for resonant frequency tuning. Two-port transmission frequency response measurements have shown that the frequency tuning range can be maximised (up to three-fold) by optimising the configuration of electrothermal transduction.

MEMS, Resonator, Tunable filter, Piezoelectric actuation, Piezoelectric sensing, Electrothermal piezoelectric tuning

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Podaci o prilogu

183-185.

2017.

objavljeno

Podaci o matičnoj publikaciji

Proceedings of the 3rd International Conference on Sensors and Electronic Instrumentation Advances

Moskva:

978-84-697-5615-7

Podaci o skupu

3rd International Conference on Sensors and Electronic Instrumentation Advances

predavanje

20.09.2017-22.09.2017

Moskva, Ruska Federacija

Povezanost rada

nije evidentirano