Self-assembly of Ge quantum dots on periodically corrugated Si surfaces (CROSBI ID 244358)
Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Buljan, Maja ; Facsko, S. ; Delač Marion, I. ; Mikšić Trontl, V. ; Kralj, M. ; Jerčinović, Marko ; Baehtz, C. ; Muecklich, A. ; Holý, V. ; Radić, Nikola ; Grenzer, J.
engleski
Self-assembly of Ge quantum dots on periodically corrugated Si surfaces
The fabrication of regularly ordered Ge quantum dot arrays on Si surfaces usually requires extensive preparation processing, ensuring clean and atomically ordered substrates, while the ordering parameters are quite limited by the surface properties of the substrate. Here, we demonstrate a simple method for fabrication of ordered Ge quantum dots with highly tunable ordering parameters on rippled Si surfaces. The ordering is achieved by magnetron sputter deposition, followed by an annealing in high vacuum. We show that the type of ordering and lattice vector parameters of the formed Ge quantum dot lattice are determined by the crystallographic properties of the ripples, i.e., by their shape and orientation. Moreover, the ordering is achieved regardless the initial amorphisation of the ripples surface and the presence of a thin oxide layer.
quantum dots
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Podaci o izdanju
107 (20)
2015.
203101-203106
objavljeno
0003-6951
1077-3118
10.1063/1.4935859