Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics (CROSBI ID 152306)
Prilog u časopisu | izvorni znanstveni rad | međunarodna recenzija
Podaci o odgovornosti
Schweigert, I.V. ; Alexandrov, A.L. ; Ariskin, D.A. ; Peeters, F.M. ; Stefanović, I. ; Kovačević, Eva ; Berndt, J. ; Winter, J.
engleski
Effect of transport of growing nanoparticles on capacitively coupled rf discharge dynamics
We present experimental and numerical studies of the properties of a capacitively coupled 13.56MHz discharge in a mixture of Ar and C2H2 with growing nanosize particles. It is found that at the initial stage of the growth, nanoparticles are accumulated near the sheath-plasma boundaries, where the ionization by electrons is maximal. The nanoparticles suppress the ionization due to the absorbing fast electrons and stimulate a quick change of the plasma parameters followed by a transition between different modes of discharge operation. At that moment the peaked distribution of the dust particles transforms into a flat one.
argon; discharges (electric); dusty plasmas; nanoparticles; organic compounds; plasma collision processes; plasma sheaths; plasma transport processes
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Podaci o izdanju
78 (2)
2008.
026410-1-026410-6
objavljeno
1539-3755
10.1103/PhysRevE.78.026410