crta
Hrvatska znanstvena Sekcija img
bibliografija
3 gif
 Naslovna
 O projektu
 FAQ
 Kontakt
4 gif
Pregledavanje radova
Jednostavno pretraživanje
Napredno pretraživanje
Skupni podaci
Upis novih radova
Upute
Ispravci prijavljenih radova
Ostale bibliografije
Slični projekti
 Bibliografske baze podataka

Pregled bibliografske jedinice broj: 742915

Zbornik radova

Autori: Pivac, Branko; Milanović, Željka; Zulim, Ivan
Naslov: Modeling of surface roughness effects on C-V characteristics of ultra thin MOS capacitors
Izvornik: Proceedings of International Conference on Thin Films, ICTF16
Skup: 16th International Conference on Thin Films
Mjesto i datum: Dubrovnik, Hrvatska, 13.-16.10.2014.
Ključne riječi: ultrathin dielectrics; surface roughness; direct tunneling; Fowler-Nordheim tunneling; C-V characteristics
Sažetak:
Permanent scaling of MOS devices pushes the ultrathin gate dielectrics into sub 2-nm regime. Physical mechanisms such as direct tunneling, surface roughness, quantum confinement, and polysilicon depletion must be accounted for determining the gate leakage current and C-V characteristic. Recently it has been demonstrated that the intrinsic reliability limit is fewer than six atomic layers, which is about 1.5 nm. Such thickness of dielectrics is found not only in modern MOS devices but also in solar cells based on quantum structures. In this work we shall explore the impact of tunneling and surface roughness on the gate capacitance of ultra-thin dielectrics. It will be demonstrated that the surface roughness has a dominant impact on C-V characteristics. We shall also show that the direct tunneling dominates over F-N tunneling for the device leakage current. The results will be discussed in the light of application for solar cells using different dielectrics.
Vrsta sudjelovanja: Poster
Vrsta prezentacije u zborniku: Sažetak
Vrsta recenzije: Međunarodna recenzija
Izvorni jezik: ENG
Kategorija: Znanstveni
Znanstvena područja:
Fizika,Elektrotehnika
Upisao u CROSBI: Željka Milanović (zeljka.milanovic@riteh.hr), 19. Pro. 2014. u 02:09 sati



Verzija za printanje   za tiskati


upomoc
foot_4